Temescal VES 2550 E-Beam System
Features include:
New CTI 9600 cryo compressor (2 months old, paid $10k for it)
On CTI regen controller
Manual and automatic deposition, IC 6000
New crystal detector w/ feedthrough for deposition feedback and control
Air cooled chiller
Alcatel mechanical pump (17 cfm)
14 kv power supply (B I G)
4 position pocket (270 MB)
Extra shields, domes etc. Many spare parts
Manuals
